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Publication Detail
Direct and alignment-insensitive measurement of cantilever curvature
  • Publication Type:
    Journal article
  • Publication Sub Type:
    Journal Article
  • Authors:
    Hermans RI, Bailey JM, Aeppli G
  • Publication date:
    15/07/2013
  • Journal:
    Applied Physics Letters
  • Volume:
    103
  • Issue:
    3
  • Status:
    Published
  • Print ISSN:
    0003-6951
Abstract
We analytically derive and experimentally demonstrate a method for the simultaneous measurement of deflection for large arrays of cantilevers. The Fresnel diffraction patterns of a cantilever independently reveal tilt, curvature, cubic, and higher order bending of the cantilever. It provides a calibrated absolute measurement of the polynomial coefficients describing the cantilever shape, without careful alignment and could be applied to several cantilevers simultaneously with no added complexity. We show that the method is easily implemented, works in both liquid media and in air, for a broad range of displacements and is especially suited to the requirements for multi-marker biosensors. © 2013 AIP Publishing LLC.
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