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Aerosol Assisted chemical vapour deposition
Aerosol Assisted Chemical Vapour deposition (AACVD) of range of thin films in particular doped metal oxides and composite materials is being investigated. Recent results include P-doped SnO2, Cl-doped ZnO and Mo-doped In2O3. These materials have applications as transparent conducting oxides (TCO). Thin films are characterised by SEM/EDX, XPS, powder XRD, UV-vis, FTIR and Raman spectroscopy.
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