We have developed combinatorial CVD for the formation of functionally graded films. This has enabled us to rapidly probe phase space and look for new materials. Using this method we have shown how morpohology and crystal orientation can be controlled in tungsten oxide films and how composite titania films consisting of rutile and anatase mixtures can be compositionally controlled. We have recently used this method to make a new oxynitride phase- Ti3O4N with the anosovite structure. The combinatorial CVd work is done in collaboration with Dr M. Green NIST, USA.