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Publication Detail
Modeling and Measurement of a HSQ Passivated UTC-PD with a 68.9 GHz Bandwidth
  • Publication Type:
  • Authors:
    Sun X, Ye S, Seddon J, Renaud CC, Hou L, Marsh JH
  • Publication date:
  • Published proceedings:
    2021 IEEE Photonics Conference, IPC 2021 - Proceedings
  • ISBN-13:
  • Status:
  • Name of conference:
    2021 IEEE Photonics Conference (IPC)
An InGaAs uni-traveling-carrier photodiode passivated using hydrogen silsesquioxane (HSQ) is reported. The device was fabricated and also simulated using 3D full-wave and equivalent circuit modeling. Both experimental and modeled results show a -3 dB frequency bandwidth of 68.9 GHz at -3 V bias.
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