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Publication Detail
Single-source precursors to gallium and indium oxide thin films
  • Publication Type:
    Journal article
  • Publication Sub Type:
    Review
  • Authors:
    Bloor LG, Carmalt CJ, Pugh D
  • Publisher:
    ELSEVIER SCIENCE SA
  • Publication date:
    06/2011
  • Pagination:
    1293, 1318
  • Journal:
    COORDIN CHEM REV
  • Volume:
    255
  • Issue:
    11-12
  • Print ISSN:
    0010-8545
  • Language:
    EN
  • Keywords:
    Gallium oxide, Indium oxide, Single-source precursors, CHEMICAL-VAPOR-DEPOSITION, GAS-SENSING PROPERTIES, DONOR FUNCTIONALIZED ALCOHOLS, ULTRASONIC SPRAY-PYROLYSIS, SPIN-COATING METHOD, SOL-GEL METHOD, P-TYPE ZNO, MOLECULAR-STRUCTURES, CRYSTAL-STRUCTURE, FLUOROALKOXIDE COMPOUNDS
  • Addresses:
    Carmalt, CJ
    UCL
    Dept Chem
    Christopher Ingold Labs
    London
    WC1H 0AJ
    England
Abstract
Gallium and indium oxide thin films have received much attention in recent years for their wide range of applications. This review summarises the literature concerning single-source precursors and the methods employed to deposit gallium and indium oxide thin films using these compounds. An update of the literature outlining compounds which are potential single-source precursors to these materials is also included. (C) 2011 Elsevier B.V. All rights reserved.
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