UCL  IRIS
Institutional Research Information Service
UCL Logo
Please report any queries concerning the funding data grouped in the sections named "Externally Awarded" or "Internally Disbursed" (shown on the profile page) to your Research Finance Administrator. Your can find your Research Finance Administrator at https://www.ucl.ac.uk/finance/research/rs-contacts.php by entering your department
Please report any queries concerning the student data shown on the profile page to:

Email: portico-services@ucl.ac.uk

Help Desk: http://www.ucl.ac.uk/ras/portico/helpdesk
Publication Detail
Remote-coupled Oxygen Plasma Harmonic Measurements for Process Monitoring
  • Publication Type:
    Chapter
  • Authors:
    Kenyon AJ, Law VJ, Bergamini S, Thornhill NF, Lee K, Watkins M, Lea L
  • Publication date:
    2003
  • Place of publication:
    New York
  • Editors:
    Gerard F
  • Book title:
    Advances in Plasma Physics Research, Vol 4
  • Keywords:
    advances, measurement, MEASUREMENTS, monitoring, Oxygen, Physics, plasma, process, processes, Research
Abstract
No abstract found
Publication data is maintained in RPS. Visit https://rps.ucl.ac.uk
 More search options
UCL Researchers
Author
Dept of Electronic & Electrical Eng
University College London - Gower Street - London - WC1E 6BT Tel:+44 (0)20 7679 2000

© UCL 1999–2011

Search by