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Publication Detail
Coherent Grazing Exit X ray Scattering Geometry for Probing the Structure of Thin Films
  • Publication Type:
    Journal article
  • Publication Sub Type:
    Article
  • Authors:
    Pfeiffer F, Zhang W, Robinson I
  • Publication date:
    2004
  • Pagination:
    1847, 1849
  • Journal:
    Applied Physics Letters
  • Volume:
    84
  • Print ISSN:
    0003-6951
  • Keywords:
    speckle, coherence, surface
  • Notes:
    New method for coherent x-ray diffraction. Will be widely used in the future.
Abstract
We demonstrate a diffraction geometry which provides strong sensitivity to the microstructure of thin films. While a coherent beam of x rays is being reflected from the surface of the sample, measurements were made of the scattering of the exit beam below the critical angle for total external reflection. This results in a strong signal with speckle modulations that are characteristic of the internal arrangement of grains at different depths within the film.
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