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Publication Detail
Growth of titanium silicate thin films by photo-induced chemical vapor deposition
  • Publication Type:
    Journal article
  • Publication Sub Type:
    Article
  • Authors:
    Wang ZM, Fang Q, Zhang JY, Wu JX, Di Y, Chen ML, Boyd IW
  • Publication date:
    2007
  • Pagination:
    167, 171
  • Journal:
    Thin Solid Films
  • Volume:
    253/53
  • Print ISSN:
    0040-6090
Abstract
No abstract found
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